Development of a Closed-Loop Control System for an Electromagnetic Positioning Device with Two Degrees of Freedom

Authors

  • Viktor N. MESHCHERYAKOV
  • Vladimir V. PIKALOV
  • Sergey E. KONDRAT’EV
  • Vladislav A. ZNAMENSKIY
  • Nikolay V. KAZYURA

DOI:

https://doi.org/10.24160/0013-5380-2026-4-61-72

Keywords:

electromagnetic drive, magnetoelectric drive, flexural guides, precision positioning, feedback control, two degrees of freedom

Abstract

The problem of precision positioning of a movable element in an electromagnetic drive with two degrees of freedom – linear displacement and angular rotation – is considered. The aim of the study is to develop a combined electromechanical system integrating electromagnetic and magnetoelectric force generation principles, along with synthesizing a closed-loop control system that compensates for drive nonlinearity. A mathematical model of the system had been constructed, which served as the basis on which a method for linearizing the control action through plant model inversion has been proposed. A combined drive configuration with independent control along two coordinates has been developed, and an algorithm for compensating the nonlinear dependence of electromagnetic force on the air gap has been implemented. The operability of the proposed system has experimentally been verified, and positioning accuracy characteristics meeting the requirements of precision optomechanical systems have been achieved. The results can be applied in designing high-speed scanning devices for optical lithography, microscopy, and laser microprocessing.

Author Biographies

Viktor N. MESHCHERYAKOV

(Lipetsk State Technical University, Lipetsk, Russia) – Head of the Automated Electric Drive and Robotics Dept., Dr. Sci. (Eng.), Professor.

Vladimir V. PIKALOV

(Lipetsk State Technical University, Lipetsk, Russia) – Docent of the Automated Electric Drive and Robotics Dept., Cand. Sci. (Eng.), Docent.

Sergey E. KONDRAT’EV

(Lipetsk State Technical University, Lipetsk, Russia) – Assistant, Postgraduate Student of the Automated Electric Drives and Robotics Dept.

Vladislav A. ZNAMENSKIY

(Lipetsk State Technical University, Lipetsk, Russia) – Head of Laboratories, Postgraduate Student of the Automated Electric Drive and Robotics Dept.

Nikolay V. KAZYURA

(Lipetsk State Technical University, Lipetsk, Russia) – Master's Student of the Automated Electric Drive and Robotics Dept.

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#

1. Pechgraber D., Csencsics E., Schitter G. Resonant Rotational Reluctance Actuator for Large Range Scanning Mirrors. – IEEE/ASME Transactions on Mechatronics, 2023, vol. 28, No. 6, pp. 3573–3582, DOI: 10.1109/TMECH.2023.3252940.

2. Heertjes M. et al. Control of Wafer Scanners: Methods and Developments. – American Control Conf., 2020, pp. 3686–3703, DOI: 10.23919/ACC45564.2020.9147464.

3. Csencsics E., Schlarp J., Schitter G. High-Performance Hybrid-Reluctance-Force-Based Tip/Tilt System: Design, Control, and Evaluation. – IEEE/ASME Transactions on Mechatronics, 2018, vol. 23, No. 5, pp. 2494–2502, DOI: 10.1109/TMECH.2018.2866272.

4. Al-Rawashdeh Y., Al Janaideh M., Heertjes M. Kinodyna-mic Generation of Wafer Scanners Trajectories Used in Semiconduc-tor Manufacturing. – IEEE Transactions on Automation Science and Engineering, 2023, vol. 20, No. 1, pp. 71–732, DOI: 10.1109/TASE.2022.3196318.

5. Ding B. et al. A Survey on the Mechanical Design for Piezo-Actuated Compliant Micro-Positioning Stages. – Review of Scientific Instruments, 2023, vol. 94, No. 10, DOI: 10.1063/5.0162246.

6. Retianza D., van Duivenbode J., Huisman H. Plant-Independent Current Sensor Gain Error Compensation for Highly Dynamic Drives. – IEEE Transactions on Industrial Electronics, 2023, vol. 70, No. 10, pp. 9948–9958, DOI: 10.1109/TIE.2022.3222697.

7. Zhang L. et al. Research Trends in Methods for Controlling Macro-Micro Motion Platforms. – Nanotechnology and Precision Engineering, 2023, vol. 6, No. 3, DOI: 10.1063/10.0019384.

8. Chen Z. et al. Design and Testing of a Damped Piezo-Driven Decoupled XYZ Stage. – IEEE Int. Conf. on Robotics and Automation, 2021, pp. 6986–6991, DOI: 10.1109/ICRA48506.2021.9561583.

9. Barros C. et al. On Feedforward Control of Piezoelectric Dual-Stage Actuator Systems. – 60th IEEE Conf. on Decision and Control, 2021, pp. 5588–5594, DOI: 10.1109/CDC45484.2021.9683598.

10. Al Saaideh M., Alatawneh N., Al Janaideh M. Design Parameters of a Reluctance Actuation System for Stable Operation Conditions with Applications of High-Precision Motions in Lithogra-phy Machines. – IET Electric Power Applications, 2022, vol. 16, No. 1, pp. 68–85, DOI: 10.1049/elp2.12135

11. Pumphrey M. et al. Recent Progress on Modeling and Control of Reluctance Actuators in Precision Motion Systems. – Precision Engineering, 2024, vol. 91, pp. 107–131, DOI: 10.1016/j.precisioneng.2024.08.016.

12. Miao Q., Liu Y., Tan J.B. Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method. – Frontiers in Energy Research, 2022, vol. 10, DOI: 10.3389/fenrg.2022.949782.

13. Burgstaller I. et al. Development of Reluctance Actuator for High-Precision Positioning and Scanning Motion. – IEEE Int. Conf. on Mechatronics, 2021, DOI: 10.1109/ICM46511.2021.9385649.

14. Mitrovic A. et al. Closed-Loop Range-Based Control of Dual-Stage Nanopositioning Systems. – IEEE/ASME Transactions on Mechatronics, 2020, vol. 26, pp. 1412–1421, DOI: 10.1109/TMECH. 2020.3020047.

15. Guo D. et al. Spatial-Temporal Trajectory Redesign for Dual-Stage Nanopositioning Systems with Application in AFM. – IEEE/ASME Transactions on Mechatronics, 2020, vol. 25, pp. 558–569, DOI: 10.1109/TMECH.2020.2971755.

16. Zhang X. et al. Hysteresis and Magnetic Flux Leakage of Long Stroke Micro/Nanopositioning Electromagnetic Actuator Based on Maxwell Normal Stress. – Precision Engineering, 2022, vol. 75, DOI: 10.1016/j.precisioneng.2022.01.003.

17. Pumphrey M., Alatawneh N., Al Janaideh M. Modeling and Analysis of Reluctance Motion System with Asymmetrical Air Gaps. – Review of Scientific Instruments, 2022, vol. 93, No. 7, DOI: 10.1063/5.0088120.

18. Cigarini F. et al. Multiphysics Finite Element Model for the Computation of the Electromechanical Dynamics of a Hyb-rid Reluctance Actuator. – Mathematical and Computer Model-ling of Dynamical Systems, 2020, vol. 26, No. 4, pp. 322–343, DOI: 10.1080/13873954.2020.1766509.

19. Lyu Z., Wu Z., Xu Q. Design of a Flexure-Based XYZ Micropositioner With Active Compensation of Vertical Crosstalk – IEEE Transactions on Automation Science and Engineering, 2024, vol. 21, No. 4, pp. 6868–6881, DOI: 10.1109/TASE.2023.3332696.

20. Lobontiu N. Compliant Mechanisms: Design of Flexure Hin-ges. Boca Raton, Florida, USA: CRC Press, 2021.

21. Zarrabi Ekbatani R. et al. Design and Control of a Flexure-Based Dual Stage Piezoelectric Micropositioner. – Int. Journal of Precision Engineering and Manufacturing, 2024, vol. 25, pp. 1793–1811, DOI: 10.1007/s12541-024-00990-0.

22. Zhou X. et al. Review on Piezoelectric Actuators: Materials, Classifications, Applications, and Recent Trends. – Frontiers of Mechanical Engineering, 2024, vol. 19, No. 1, DOI: 10.1007/s11465-023-0772-0.

23. Zhu B. et al. Design of Compliant Mechanisms Using Conti-nuum Topology Optimization: A Review. – Mechanism and Machine Theory, 2020, vol. 143, DOI: 10.1016/j.mechmachtheory.2019.103622.

24. Wang Q., Long Y., Wei J. Fatigue Damage Stiffness Degradation Modeling of Right Circular Flexure Hinges. – AIP Advances, 2023, vol. 13, No. 4, DOI: 10.1063/5.0139447

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Published

2026-04-11

Issue

No. 4 (2026): Issue № 4

Section

Article