Разработка системы управления с обратной связью для электромагнитного позиционирующего устройства с двумя степенями свободы
DOI:
https://doi.org/10.24160/0013-5380-2026-4-61-72Ключевые слова:
электромагнитный привод, магнитоэлектрический привод, флексурные направляющие, прецизионное позиционирование, управление с обратной связью, две степени свободыАннотация
В статье решается задача прецизионного позиционирования подвижного элемента электромагнитного привода одновременно по двум степеням свободы – линейному перемещению и угловому повороту. Цель исследований – разработка комбинированной электромеханической системы, сочетающей электромагнитный и магнитоэлектрический принципы создания силы, а также синтез системы управления с обратной связью, обеспечивающей компенсацию нелинейности привода. Построена математическая модель системы, на основе которой предложен метод линеаризации управляющего воздействия посредством инверсии модели объекта. Разработана комбинированная схема привода с независимым управлением по двум координатам и реализован алгоритм компенсации нелинейной зависимости электромагнитной силы от воздушного зазора. Экспериментально подтверждена работоспособность предложенной системы и достигнуты характеристики точности, соответствующие требованиям прецизионных оптико-механических систем. Результаты могут быть использованы при создании быстродействующих сканирующих устройств для оптической литографии, микроскопии и лазерной микрообработки.
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1. Pechgraber D., Csencsics E., Schitter G. Resonant Rotational Reluctance Actuator for Large Range Scanning Mirrors. – IEEE/ASME Transactions on Mechatronics, 2023, vol. 28, No. 6, pp. 3573–3582, DOI: 10.1109/TMECH.2023.3252940.
2. Heertjes M. et al. Control of Wafer Scanners: Methods and Developments. – American Control Conf., 2020, pp. 3686–3703, DOI: 10.23919/ACC45564.2020.9147464.
3. Csencsics E., Schlarp J., Schitter G. High-Performance Hybrid-Reluctance-Force-Based Tip/Tilt System: Design, Control, and Evaluation. – IEEE/ASME Transactions on Mechatronics, 2018, vol. 23, No. 5, pp. 2494–2502, DOI: 10.1109/TMECH.2018.2866272.
4. Al-Rawashdeh Y., Al Janaideh M., Heertjes M. Kinodyna-mic Generation of Wafer Scanners Trajectories Used in Semiconduc-tor Manufacturing. – IEEE Transactions on Automation Science and Engineering, 2023, vol. 20, No. 1, pp. 71–732, DOI: 10.1109/TASE.2022.3196318.
5. Ding B. et al. A Survey on the Mechanical Design for Piezo-Actuated Compliant Micro-Positioning Stages. – Review of Scientific Instruments, 2023, vol. 94, No. 10, DOI: 10.1063/5.0162246.
6. Retianza D., van Duivenbode J., Huisman H. Plant-Independent Current Sensor Gain Error Compensation for Highly Dynamic Drives. – IEEE Transactions on Industrial Electronics, 2023, vol. 70, No. 10, pp. 9948–9958, DOI: 10.1109/TIE.2022.3222697.
7. Zhang L. et al. Research Trends in Methods for Controlling Macro-Micro Motion Platforms. – Nanotechnology and Precision Engineering, 2023, vol. 6, No. 3, DOI: 10.1063/10.0019384.
8. Chen Z. et al. Design and Testing of a Damped Piezo-Driven Decoupled XYZ Stage. – IEEE Int. Conf. on Robotics and Automation, 2021, pp. 6986–6991, DOI: 10.1109/ICRA48506.2021.9561583.
9. Barros C. et al. On Feedforward Control of Piezoelectric Dual-Stage Actuator Systems. – 60th IEEE Conf. on Decision and Control, 2021, pp. 5588–5594, DOI: 10.1109/CDC45484.2021.9683598.
10. Al Saaideh M., Alatawneh N., Al Janaideh M. Design Parameters of a Reluctance Actuation System for Stable Operation Conditions with Applications of High-Precision Motions in Lithogra-phy Machines. – IET Electric Power Applications, 2022, vol. 16, No. 1, pp. 68–85, DOI: 10.1049/elp2.12135
11. Pumphrey M. et al. Recent Progress on Modeling and Control of Reluctance Actuators in Precision Motion Systems. – Precision Engineering, 2024, vol. 91, pp. 107–131, DOI: 10.1016/j.precisioneng.2024.08.016.
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20. Lobontiu N. Compliant Mechanisms: Design of Flexure Hin-ges. Boca Raton, Florida, USA: CRC Press, 2021.
21. Zarrabi Ekbatani R. et al. Design and Control of a Flexure-Based Dual Stage Piezoelectric Micropositioner. – Int. Journal of Precision Engineering and Manufacturing, 2024, vol. 25, pp. 1793–1811, DOI: 10.1007/s12541-024-00990-0.
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24. Wang Q., Long Y., Wei J. Fatigue Damage Stiffness Degradation Modeling of Right Circular Flexure Hinges. – AIP Advances, 2023, vol. 13, No. 4, DOI: 10.1063/5.0139447
